Nanomaterials processing & Plasma Polymerization

Multipurpose deposition system
  • Thermal sputtering from three independent resistive-heated evaporators rigged by protecting movable defense screens.
  • Rich magazine is completed by different basket, spiral and effusion-type evaporators;
  • “Flash”-sputtering from two independent sources with the use of electromagnetic controllNanomaterials processing & Plasma
  • Polymerizationer for material batch preparation;
  • DC/RF-magnetron sputtering (300 VA) from 3 independent magnetrons using target of convenient size (< 40 mm ΓΈ);
  • Electron-beam evaporation;
  • Ion-plasma sputtering (350 VA);
Nanomaterials processing & Plasma Polymerization
RF-plasma reactor
Designed for FIA – into a plasma stream
  • Nanoparticles synthesis
  • Inorgani style=”font-weight: bold; text-decoration: underline;”c copolymers
  • Hydride synthesis
Nanomaterials processing & Plasma Polymerization
DC-plasma reactor
  • Plasma polymerization
  • Thin polymer films deposition
  • Liquid monomer injection
  • Thin film nanocomposites
  • A new version with FIA system is in development
Nanomaterials processing & Plasma Polymerization
Heater – 1600 C, controlled atmosphere
(in acquisition 2008)
Nanomaterials processing & Plasma Polymerization
Photoresist processing
Thermo centrifugal processing
Electrospinning